Electronic Gases

Electronic and Semiconductor gases are specialized for microelectronic manufacturing or semiconductor processing applications such as thin film deposition - including both chemical vapour deposition (CVD) and physical vapour deposition (PVD) - etching, RTP, packaging, or soldering.

Electronic and Semiconductor gases includes pure gases and gas mixtures configured for specific purposes, including crystal growth, wafer fabrication, oxidation, thermal diffusion, and ion implantation.

Electronic and Semiconductor gases for semiconductor manufacturing include (there are many more):

Ammonia (NH3) Silane (SiCl4)
Sulfur Hexaflouride (SF6) Nitrogen Trifluoride (NF3)
Nitrous Oxide (N2O) Nitric Oxide (NO)

 See also our reference list under “Corrosive Gases”

Ne, H2 , Ar/O2 , N2 , CH4 , CO , CO2 , N2O, Kr, Xe, Hydrocarbons

Levels of Detection to parts per billion (ppb) are reached using an AGC Instruments Gas Chromatograph.

Select from the Series 600 Laboratory Gas Chromatograph or the Series 100 19" Rack Gas Chromatograph where we use only the best quality fittings to ensure a perfect leak tight, quality build to ensure excellent detection levels each time.

For more information on how AGC Instruments can assist you with Electronic Gas Analysis please contact us directly.